Silicon nano-transistors for logic applications

نویسندگان

  • Robert Chau
  • Boyan Boyanov
  • Brian Doyle
  • Mark Doczy
  • Suman Datta
  • Scott Hareland
  • Ben Jin
  • Jack Kavalieros
  • Matthew Metz
چکیده

Silicon transistors have undergone rapid miniaturization in the past several decades. Recently reported CMOS devices have dimensional scales approaching the “nano-transistor” regime. This paper discusses performance characteristics of a MOSFET device with 15 nm physical gate length. In addition, aspects of a non-planar CMOS technology that bridges the gap between traditional CMOS and the nano-technology era will be presented. It is likely that this non-planar device will form the basic device architecture for future generations of nano-technology. ? 2003 Elsevier B.V. All rights reserved. PACS: 85.40.U; 85.30.T

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تاریخ انتشار 2003